Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits
نویسندگان
چکیده
منابع مشابه
Heterogenous integration of InP/InGaAsP photodetectors onto ultracompact Silicon-on-Insulator waveguide circuits
We present the heterogeneous integration of InP/InGaAsP photodetectors onto ultracompact Silicon-onInsulator (SOI) waveguide circuits using benzocyclobutene (BCB) die to wafer bonding. This technology development enables the integration of a photonic interconnection layer on top of CMOS. Fabrication processes were optimized and the transfer of a passive Silicon-on-Insulator waveguide layer usin...
متن کاملIntegration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits.
The integration of optical functionalities on a chip has been a long standing goal in the optical community. Given the call for more integration, Silicon-on-Insulator (SOI) is a material system of great interest. Although mature CMOS technology can be used for the fabrication of passive optical functionality, particular photonic functions like efficient light emission still require III-V semico...
متن کاملThin film InGaAs MSM photodetectors integrated onto silicon-on-insulator waveguide circuits
Silicon-on-insulator (SOI) is rapidly emerging as a versatile platform for a variety of integrated nanophotonic components. High density waveguide circuits can be fabricated using standard CMOS processing techniques. However, light detection in the near-infrared wavelength range (1550 nm) is not possible in silicon which is naturally transparent in this region. One possibility for overcoming th...
متن کاملLaser and photodetector integration on Silicon-on-insulator waveguide circuits: towards a fully integrated SWIR spectrometer
Alban Gassenq: Born in Montpellier in 1983, he received his diploma in opto-electronic engineering from the University of Montpellier 2 (UM2) in 2006. He then worked towards a PhD degree in the Nanomir group of the Institut d’Electronique du Sud at UM2. He got the PhD degree in Semiconductors for MidIR applications in 2010. Now, he works in the Photonics Research Group of Ghent University – IME...
متن کاملPhoto-spectrometer based on the integration of InP/InGaAs photodetectors onto a Silicon-on- insulator etched diffraction grating
─We present the design and simulation results of an integrated wavelength demultiplexer. The device’s major components, which include the Silicon-on-insulator (SOI) etched diffraction grating and waveguide integrated InP/InGaAs MSM photodetectors are discussed in detail. The Silicon-on-insulator diffraction grating is fabricated using standard CMOS processes. The photodetectors are integrated o...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2005
ISSN: 1094-4087
DOI: 10.1364/opex.13.010102